JPH0431550Y2 - - Google Patents

Info

Publication number
JPH0431550Y2
JPH0431550Y2 JP9163885U JP9163885U JPH0431550Y2 JP H0431550 Y2 JPH0431550 Y2 JP H0431550Y2 JP 9163885 U JP9163885 U JP 9163885U JP 9163885 U JP9163885 U JP 9163885U JP H0431550 Y2 JPH0431550 Y2 JP H0431550Y2
Authority
JP
Japan
Prior art keywords
leaf spring
spring
displacement member
pendulum
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9163885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61206815U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9163885U priority Critical patent/JPH0431550Y2/ja
Publication of JPS61206815U publication Critical patent/JPS61206815U/ja
Application granted granted Critical
Publication of JPH0431550Y2 publication Critical patent/JPH0431550Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Springs (AREA)
JP9163885U 1985-06-18 1985-06-18 Expired JPH0431550Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9163885U JPH0431550Y2 (en]) 1985-06-18 1985-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9163885U JPH0431550Y2 (en]) 1985-06-18 1985-06-18

Publications (2)

Publication Number Publication Date
JPS61206815U JPS61206815U (en]) 1986-12-27
JPH0431550Y2 true JPH0431550Y2 (en]) 1992-07-29

Family

ID=30647706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9163885U Expired JPH0431550Y2 (en]) 1985-06-18 1985-06-18

Country Status (1)

Country Link
JP (1) JPH0431550Y2 (en])

Also Published As

Publication number Publication date
JPS61206815U (en]) 1986-12-27

Similar Documents

Publication Publication Date Title
CA1281203C (en) Vibratory digital integrating accelerometer
EP3640591B1 (en) Microelectromechanical device for detection of rotational motion
EP1472507B1 (en) Micromachined gyroscope
US6070463A (en) Angular velocity sensor
EP2802883B1 (en) A vibration tolerant accelaration sensor structure
KR930000956A (ko) 가속도계
JPS6034069B2 (ja) 変換器用保証質量組立体
KR960042013A (ko) 튜닝 포크(tuning fork)형 자이로스코프
WO1999038016A8 (en) An arrangement for measuring angular velocity
JP2013140147A (ja) マイクロメカニクスによるコリオリ式回転速度センサ
JP4719751B2 (ja) 角速度のための振動マイクロ−メカニカルセンサー
JPH0431550Y2 (en])
US6895819B1 (en) Acceleration sensor
JPH0455249B2 (en])
KR970007042B1 (ko) H형상 진동자 보유 진동 자이로
US2964952A (en) Straingage rate gyro
JPH0450483Y2 (en])
JPH0639334Y2 (ja) 力学量センサ
US20240191993A1 (en) Micromechanical component for a rotation rate sensor
JPH0560876A (ja) 光センサ
JPH0326411Y2 (en])
JPH0434410Y2 (en])
JPH0633364Y2 (ja) 傾斜角検知器
JPS63172915A (ja) ジヤイロ装置
JP3493477B2 (ja) 差動容量型加速度検出器